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Fabrication of supersmooth surfaces with low subsurface damage

Author(s):
  • Z. Shen ( Tongji Univ., China )
  • B. Ma ( Tongji Univ., China )
  • Z. Wang ( Tongji Univ., China )
  • Y. Ji ( Tianjin Jinhang Institute of Technology Physics, China )
  • T. Liu ( Tianjin Jinhang Institute of Technology Physics, China )
Publication title:
Advanced optical manufacturing technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6722
Pub. Year:
2007
Vol.:
2
Page(from):
67223W-1
Page(to):
67223W-6
Pages:
6
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468796 [0819468797]
Language:
English
Call no.:
P63600/6722
Type:
Conference Proceedings

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