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Calculating subtool pressures by using genetic algorithms

Author(s):
Publication title:
Advanced optical manufacturing technologies
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6722
Pub. Year:
2007
Vol.:
1
Page(from):
672204-1
Page(to):
672204-5
Pages:
5
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468796 [0819468797]
Language:
English
Call no.:
P63600/6722
Type:
Conference Proceedings

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