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MEMS tunable silicon Fabry-Perot cavity

Author(s):
  • J. Masson ( École Polytechnique de Montréal, Canada )
  • F. B. Koné ( École Polytechnique de Montréal, Canada )
  • Y.-A. Peter ( École Polytechnique de Montréal, Canada )
Publication title:
Optomechatronic micro/nano devices and components III : 8-10 October 2007, Lausanne, Switzerland
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6717
Pub. Year:
2007
Page(from):
671705-1
Page(to):
671705-9
Pages:
9
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468659 [0819468657]
Language:
English
Call no.:
P63600/6717
Type:
Conference Proceedings

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