MEMS tunable silicon Fabry-Perot cavity
- Author(s):
- J. Masson ( École Polytechnique de Montréal, Canada )
- F. B. Koné ( École Polytechnique de Montréal, Canada )
- Y.-A. Peter ( École Polytechnique de Montréal, Canada )
- Publication title:
- Optomechatronic micro/nano devices and components III : 8-10 October 2007, Lausanne, Switzerland
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6717
- Pub. Year:
- 2007
- Page(from):
- 671705-1
- Page(to):
- 671705-9
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819468659 [0819468657]
- Language:
- English
- Call no.:
- P63600/6717
- Type:
- Conference Proceedings
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