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Silicon planar lenses for high-energy x-ray nanofoc using

Author(s):
  • A. Snigirev ( European Synchrotron Radiation Facility (France) )
  • I. Snigireva ( European Synchrotron Radiation Facility (France) )
  • M. Grigoriev ( Institute of Microelectronics Technology (Russia) )
  • V. Yunkin ( Institute of Microelectronics Technology (Russia) )
  • M. Di Michiel ( European Synchrotron Radiation Facility (France) )
Publication title:
Advances in X-ray/EUV optics, components, and applications II : 27-28 August 2007, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6705
Pub. Year:
2007
Page(from):
670506-1
Page(to):
670506-11
Pages:
11
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468536 [0819468533]
Language:
English
Call no.:
P63600/6705
Type:
Conference Proceedings

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