Silicon planar lenses for high-energy x-ray nanofoc using
- Author(s):
- A. Snigirev ( European Synchrotron Radiation Facility (France) )
- I. Snigireva ( European Synchrotron Radiation Facility (France) )
- M. Grigoriev ( Institute of Microelectronics Technology (Russia) )
- V. Yunkin ( Institute of Microelectronics Technology (Russia) )
- M. Di Michiel ( European Synchrotron Radiation Facility (France) )
- Publication title:
- Advances in X-ray/EUV optics, components, and applications II : 27-28 August 2007, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6705
- Pub. Year:
- 2007
- Page(from):
- 670506-1
- Page(to):
- 670506-11
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819468536 [0819468533]
- Language:
- English
- Call no.:
- P63600/6705
- Type:
- Conference Proceedings
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