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Image blur analysis for the subpixel-level measurement of in-plane vibration parameters of MEMS resonators

Author(s):
  • H. V. Le ( Vietnam National Univ. (Vietnam) )
  • M. Gouiffes ( Institute d'Electronique Fondamentale (France) )
  • F. Parrain ( Institute d'Electronique Fondamentale (France) )
  • A. Bosseboeuf ( Institute d'Electronique Fondamentale (France) )
  • B. Zavidovique ( Institute d'Electronique Fondamentale (France) )
Publication title:
Applications of digital image processing XXX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6696
Pub. date:
2007
Vol.:
2
Page(from):
66962D-1
Page(to):
66962D-12
Pages:
12
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819468444 [0819468444]
Language:
English
Call no.:
P63600/6696
Type:
Conference Proceedings

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