Simulation of thermoelastic damping of MEMS mirror using a finite element analysis
- Author(s):
- H. Tang ( Univ. of Denver (USA) )
- Y.-B. Yi ( Univ. of Denver (USA) )
- M. A. Matin ( Univ. of Denver (USA) )
- Publication title:
- Optics and photonics for information processing : 28-30 August 2007, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6695
- Pub. Year:
- 2007
- Page(from):
- 66951J-1
- Page(to):
- 66951J-9
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819468437 [0819468436]
- Language:
- English
- Call no.:
- P63600/6695
- Type:
- Conference Proceedings
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