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Design and research of zoom optic system applied in micro-processing using 248nm KrF excimer laser

Author(s):
  • X. Liu ( Beijing Univ. of Technology (China) )
  • T. Chen ( Beijing Univ. of Technology (China) )
  • T. Zuo ( Beijing Univ. of Technology (China) )
Publication title:
International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6624
Pub. date:
2008
Page(from):
66240I-1
Page(to):
66240I-8
Pages:
8
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819467669 [0819467669]
Language:
English
Call no.:
P63600/6624
Type:
Conference Proceedings

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