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Image pattern recognition application in SEM imaging system

Author(s):
  • H. Liu ( Henghua Technologies Co., Ltd. (China) )
  • X. Wang ( East China Normal Univ. (China) )
Publication title:
International Symposium on Photoelectronic Detection and Imaging 2007, image processing : 9-12 September 2007, Beijing China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6623
Pub. Year:
2008
Page(from):
662320-1
Page(to):
662320-7
Pages:
7
Pub. info.:
Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
ISSN:
0277786X
ISBN:
9780819467652 [0819467650]
Language:
English
Call no.:
P63600/6623
Type:
Conference Proceedings

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