Low-damage wet chemical etching for GaN-based visible-blind p-i-n detector
- Author(s):
- Publication title:
- International Symposium on Photoelectronic Detection and Imaging 2007, photoelectronic imaging and detection : 9-12 September 2007, Beijing China
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 6621
- Pub. Year:
- 2008
- Page(from):
- 66211D-1
- Page(to):
- 66211D-10
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: Society of Photo-optical Instrumentation Engineers
- ISSN:
- 0277786X
- ISBN:
- 9780819467638 [0819467634]
- Language:
- English
- Call no.:
- P63600/6621
- Type:
- Conference Proceedings
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