Oxidation lift-off technology [5730-18]
- Author(s):
- S. Oktyabrsky ( Univ. at Albany (USA) )
- M. Yakimov ( Univ. at Albany (USA) )
- V. Tokranov ( Univ. at Albany (USA) )
- J. van Eisden ( Univ. at Albany (USA) )
- A. Katsnelson ( Univ. at Albany (USA) )
- Publication title:
- Optoelectronic Integration on Silicon II
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5730
- Pub. Year:
- 2005
- Page(from):
- 149
- Page(to):
- 157
- Pages:
- 9
- Pub. info.:
- Bellingham, WA: SPIE
- ISSN:
- 0277786X
- ISBN:
- 9780819457042 [0819457043]
- Language:
- English
- Call no.:
- P63600/5730
- Type:
- Conference Proceedings
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