Ultra-Large Area RF Plasma Sources Employing Multiple Low-Inductance Internal-Antenna Modules for Flat Panel Display Processing
- Author(s):
- Publication title:
- PRICM 6 : selected, peer reviewed papers from The sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea
- Title of ser.:
- Materials science forum
- Ser. no.:
- 561-565
- Pub. Year:
- 2007
- Vol.:
- 561-565
- Pt.:
- 2
- Page(from):
- 1237
- Page(to):
- 1240
- Pages:
- 4
- Pub. info.:
- Uetikon-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878494620 [0878494626]
- Language:
- English
- Call no.:
- M23650
- Type:
- Conference Proceedings
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