Investigation of Mechanical and Structural Properties of AlN Thin Films Prepared by Mid-Frequency Pulsed Magnetron Sputtering

Investigation of Mechanical and Structural Properties of AlN Thin Films Prepared by Mid-Frequency Pulsed Magnetron Sputtering

Author(s):

Z.X. Mu

Publication title:

PRICM 6 : selected, peer reviewed papers from The sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea

Title of ser.:

Materials science forum

Ser. no.:

561-565

Pub. Year:

2007

Vol.:

561-565

Pt.:

2

Page(from):

1185

Page(to):

1188

Pages:

4

Pub. info.:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494620 [0878494626]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00051900
Series ID:	PA00000012
Conf. info. (Name):	The Sixth Pacific Rim International Conference On Advanced Materials and Processing
Conf. info. (Number):	6th
Conf. info. (Venue):	Jeju Island, Korea
Conf. info. (Date):	2007.11.05-2007.11.09

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