Blank Cover Image

Silicon Nanowires Obtained by Low Temperature Plasma-based Chemical Vapor Deposition.

Author(s):
Publication title:
Functional nanowires and nanotubes : symposium held November 28-December 2 2011, Boston Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1408
Pub. Year:
2012
Page(from):
139
Page(to):
144
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605113852 [1605113859]
Language:
English
Call no.:
M23500/1408
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Indium in Silicon: A Study on Diffusion and Electrical Activation

Scalese, S., Magna, A. La, Mannino, G., Privitera, V., Bersani, M., Giubertoni, D., Solmi, S., Pichler, P.

Materials Research Society
7 Conference Proceedings Polymorphous Silicon Nanowires Synthesized by Plasma-Enhanced Chemical Vapor Deposition

Zeng, X.B., Liao, X.B., Diao, H.W., Hu, Z.H., Xu, Y.Y., Zhang, S.B., Chen, C.Y., Chen, W.D., Kong, G.L.

Materials Research Society
2 Conference Proceedings Indium in Silicon : Interactions With Native Defects and With C Impurities

Alippi, P., Magna, A.La, Scalese, S., Privitera, V.

Materials Research Society
8 Conference Proceedings Characterization of hydrogenated silicon carbide produced by plasma enhanced chemical vapor deposition at low temperature

G. Pareschi, G. Taglioni, S. Basso, O. Citterio, V. De Caprio

Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Point-Defect Migration in Crystalline Silicon: Impurity Content, Surface and Stress Effects

Coffa, S., Libertino, S., Magna, A. La, Privitera, V., Mannino, G., Priolo, F.

MRS - Materials Research Society
9 Conference Proceedings Role of C and Ge in the Electrical Activation of In Implanted in Silicon

Scalese, S., Privitera, V., Italia, M., Magna, A.La, Alippi, P., Renna, L.

Materials Research Society
4 Conference Proceedings Ultra-Shallow Junction Formation by Excimer Laser Annealing of Ultra-Low Energy B Implanted in Si

Fortunato, G., Mariucci, L., Privitera, V., Magna, A. La, Whelan, S., Mannino, G.

Materials Research Society
10 Conference Proceedings Low-Temperature Remote-Plasma-Assisted Jet Vapor Deposition of Silicon Nitride

Veteran, J., Hobbs, C., Hegde, R., Tobin, P., Wang, V., Tseng, H., Kenig, G., Hartig, M., Tamagawa, T., Doran, R., …

MRS - Materials Research Society
5 Conference Proceedings Ultra-Low Energy Boron Implants in Crystalline Silicon: Atomic Transport Properties and Electrical Activation

Napolitani, E., Carnera, A., Privitera, V., Magna, A. La, Schroer, E., Priolo, F., Mannino, G., Moffatt, S.

MRS - Materials Research Society
11 Conference Proceedings Low Temperature Chemical Vapor Deposition of Group-III-Nitrides

Fischer, R.A., Rogge, W.

Electrochemical Society
6 Conference Proceedings Low-Temperature Low-Stress Silicon Nitride for Optoelectronic Applications Prepared by Electron-Cyclotron Resonance Plasma Chemical Vapor Deposition

Belkouch, S., Landheer, D., Taylor, R., Rajesh, K., Sproule, G. I.

MRS - Materials Research Society
12 Conference Proceedings Development of low temperature silicon nitride and silicon dioxide films by inductively-coupled plasma chemical vapor deposition

Lee, J.W., Mackenzie, K.D., Johnson, D., Pearton, S.J., Ren, F., Sasserath, J.N.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12