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Effects of Silicon Doping and Threading Dislocation Density on Stress Evolution in AlGaN Films

Author(s):
Joan M. Redwing
Ian C. Manning
Xiaojun Weng
Sarah M. Eichfeld
Jeremy D. Acord
Mark A. Fanton
David W. Snyder
2 more
Publication title:
Compound semiconductors for generating, emitting, and manipulating energy : symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1396
Pub. date:
2012
Vol.:
1396
Page(from):
183
Page(to):
192
Pages:
10
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605113739 [1605113735]
Language:
English
Call no.:
M23500/1396
Type:
Conference Proceedings

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