Blank Cover Image

Aluminum Alloy Formation and Impacts in Advanced Replacement Metal Gate Process

Author(s):
K. Xu
Y. Wang
S.H. Shen
X. Xia
W.Ch. Tu
L. Karuppiah
H. Yang
Z. Ge
Y. Lei
M. Allen
N. Yoshida
L.W. Chang
B. Liu
M. Okazaki
A. Brand
10 more
Publication title:
Structural and chemical characterization of metals, alloys and compounds, 2011 : symposium held August 14-19, 2011, Cancún, Mexico
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1372
Pub. Year:
2012
Page(from):
107
Page(to):
116
Pages:
10
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605113494 [1605113492]
Language:
English
Call no.:
M23500/1372
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Distributed monitoring architecture for movable objects over the GSM system

Chen,J.-F., Lin,W.Ch., Chung,C.M., Tsai,K.H., Chang,C.H., Hu,W.Ch.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Evaluation of impacts of ecological water conveyances on hydrological processes and land cover in Tarim River basin, China, using groundwater levels and MODIS …

Q. Shen, J. Xu, Y. Lei

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings COMPOUND FORMATION AND SILICON BEHAVIOR IN TITANIUM AND TANTALUM LAYERED ALUMINUM FILMS

Shen, B.W., Anthony, J.M., Chang, P.-H., Keenan, J., Matyi, R., Tsai, H.L.

Materials Research Society
8 Conference Proceedings Impact of Positive Charges on NBTI Degradation and Characterization in Ultra-Thin SiON Gate Dielectrics

J. Lei, M. Xu

Electrochemical Society
3 Conference Proceedings Weldability Studies on the Replacement Repair Welded Joints of a Damaged Steel Bridge

K.H. Chang, H.C. Park, C.H. Lee, G.C. Jang, S.H. Lee

Trans Tech Publications
9 Conference Proceedings Dynamic MTW: a dynamic bandwidth distribution scheme in EPON

Chen, H., Ge, L.W., Zeng, L.G.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Performance Impact of silicided Source/Drain/Gate on Deep Submicron CMOS Circuits

L.K. Wang, W.H. Chang, T. Lii

Electrochemical Society
10 Conference Proceedings Low Temperature Grown Thin InAlAs Step Graded Buffers for Application on Optical Modulator at 1.3 ｦﾌm

Shen, Lei, Wieder, H. H., Chang, W. S. C.

MRS - Materials Research Society
5 Conference Proceedings The self similar pulse formation study of mode-locked fibre lasers

C. Tu, T. Lei, W. Guo, D. Wei, H. Zhu

Society of Photo-optical Instrumentation Engineers
11 Conference Proceedings Impact and characterization of mask repair on wafer CD uniformity

Chang,H.M., Shieh,W.B., Liu,J., Chu,B., Tu,L.H., Cheng,J., Wang,D., Hentschel,S.L., Hsu,V.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings The Vertical Replacement-Gate (VRG) MOSFET: A High-Performance, Vertical MOSFET with Lithography-Independent Critical Dimensions

Hergenrother, J.M., Oh, S.H., Nigam, T., Monroe, D., Klemens, F.P., Kornblit, A., Baumann, F.H., Grazul, J.L., Johnson, …

Electrochemical Society
12 Conference Proceedings 46 Novel Dual Metal Gate Technology Using Mo-MoSix for Advanced MOS Device Applications

Li, T.-Z., Ho, W.-L., Wang, H. C-. H., Chang, C.-Y.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12