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Specific Contact Resistance of Ohmic Contacts to N-type SiC Membranes

Author(s):
N.F. Mohd Nasir
A.S. Holland
G.K. Reeves
P.W. Leech
A. Collins
P. Tanner
1 more
Publication title:
Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1335
Pub. date:
2012
Vol.:
1335
Page(from):
99
Page(to):
104
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605113128 [1605113123]
Language:
English
Call no.:
M23500/1335
Type:
Conference Proceedings

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