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Comparison of TiN Thin Films Grown on SiO2 by Reactive dc Magnetron Sputtering and High Power Impulse Magnetron Sputtering

Author(s):
Publication title:
Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1335
Pub. Year:
2012
Page(from):
93
Page(to):
98
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781605113128 [1605113123]
Language:
English
Call no.:
M23500/1335
Type:
Conference Proceedings

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