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Piezoelectric Films for MEMS Applications

Author(s):
S. Trolier-McKinstry
N. Bassiri Gharb
E. Hong
J. Lacey
J. Nino
F. Xu
R. A. Wolf
T. Yoshimura
Q. Zhang
Q. Zhou
5 more
Publication title:
Epitaxial growth of functional oxides : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-29
Pub. Year:
2003
Page(from):
190
Page(to):
195
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774529 [1566774527]
Language:
English
Call no.:
E23400/200329
Type:
Conference Proceedings

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