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HfO2 Gate Dielectrics Deposited via Tetrakis Dlethylamido Hafnium

Author(s):
J. Schaeffer
N. V. Edwards
R. Liu
D. Roan
B. Hradsky
R. Gregory
J. Kulik
E. Duda
L. Contreras
J. Christiansen
S. Zollner
P. Tobin
B.-Y. Nguyen
R. Nieh
M. Ramon
R. Rao
R. Hegde
R. Rai
J. Baker
S. Voight
15 more
Publication title:
Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2002-28
Pub. Year:
2002
Page(from):
49
Page(to):
62
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773959 [1566773954]
Language:
English
Call no.:
E23400/200228
Type:
Conference Proceedings

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