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AN ADVANCED DIELECTRIC ISOLATION STRUCTURE FOR SOI-CMOS/BICMOS VLSIS

Author(s):
H. Nishizawa
S. Azuma
T. Yoshitake
H. Masuda
M. Kawaji
A. Anzai
1 more
Publication title:
Proceedings of the Second International Symposium on Semiconductor Wafer Bonding--Science, Technology, and Applications
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-29
Pub. date:
1993
Vol.:
1993-29
Page(from):
176
Page(to):
188
Pages:
13
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770682 [1566770688]
Language:
English
Call no.:
E23400/940556
Type:
Conference Proceedings

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