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Effect of Ion Enery and Dose on the Diffusion of Silicon Implanted into Gallium Arsenide

Author(s):
Publication title:
Proceedings of the Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-27
Pub. date:
1993
Vol.:
1993-27
Page(from):
309
Page(to):
315
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770699 [1566770696]
Language:
English
Call no.:
E23400/940142
Type:
Conference Proceedings

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