Improved RIE-Technique for Controlled Roughness and Anisotropy in InP-Based Devices
- Author(s):
Y. S. Dei C. van Dam F. P. van Ham L. H. Spiekman B. H. Verbeek F. H. Groen E. G. Metaal J. W. Pedersen - Publication title:
- Proceedings of the Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII)
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1993-27
- Pub. Year:
- 1993
- Page(from):
- 134
- Page(to):
- 141
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770699 [1566770696]
- Language:
- English
- Call no.:
- E23400/940142
- Type:
- Conference Proceedings
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