Epitaxial Growth of SiC and Their Applications

Author(s):

H. Matsunami  

Publication title:

Proceedings of the Eighteenth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XVIII)

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1993-27

Pub. Year:

1993

Page(from):

48

Page(to):

57

Pages:

10

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770699 [1566770696]

Language:

English

Call no.:

E23400/940142

Type:

Conference Proceedings