Blank Cover Image

Effect of Silicon Surface Orientation on Very Oxide Reliability

Author(s):
Publication title:
Proceedings of the Symposia on Interconnects, Contact Metallization, and Multilevel Metallization and Reliability for Semiconductor Devices, Interconnects, amd Thin Insulator Materials
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-25
Pub. Year:
1993
Page(from):
362
Page(to):
371
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770675 [156677067X]
Language:
English
Call no.:
E23400/940140
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High Reliability of Ultraclean Oxide Films

M. Morita, K. Nakamura, A. Teramoto, K. Makihara, T. Ohmi

Electrochemical Society
7 Conference Proceedings SPECIALTY GAS INTERACTIONS WITH ULTRACLEAN SILICON SURFACES

Shirai, Yasuyuki, Nakamura, Masakazu, Ohmi, Tadahiro

Electrochemical Society
2 Conference Proceedings Improvement of Gate Oxide Integrity by Preparing Atomic Order Flattened Si (100) Surface

Nakamura, O., Ohkawa, T., Ohmi, T.

Electrochemical Society
8 Conference Proceedings Low-Temperature Formation of Gate-Grade Silicon Oxide Films Using High-Density Krypton Plasma

Saito, Y., Sekine, K., Hirayama, M., Ohmi, T.

Electrochemical Society
3 Conference Proceedings CHEMICAL OXIDE PASSIVATION FOR VERY THIN OXIDE FORMATION

Takano, J., Makihara, K., Ohmi, T.

MRS - Materials Research Society
9 Conference Proceedings The Effect of Oxygen Partial Pressure on Surface Tension and Thermocapillary Flow of Molten Silicon

Hibiya, T., Azami, T., Nakamura, S., Mukai, K., Sumiji, M.

ESA Publications Division
4 Conference Proceedings Revolution of Silicon Substrate Surface Cleaning

Ohmi, T.

Electrochemical Society
10 Conference Proceedings Influence of carbon contamination on ultrathin gate oxide reliability

Iwamoto,T., Miyake,T., Ohmi,T.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings ULTRA THIN OXIDE FORMATION USING CHEMICAL OXIDE PASSIVATION

Nakamura, K., Futatsuki, T., Makihara, K., Ohmi, T.

Electrochemical Society
11 Conference Proceedings The Removal Efficiency of Copper Impurity on Various Silicon Surfaces

Sekine, K., Choi, G.-M., Morita, H., Ohmi, T.

Electrochemical Society
6 Conference Proceedings THE EFFECT OF OXYGEN CONCENTRATION IN CLEANING PROCESS ON SILICON SURFACE

N. Mizutani, H. Morinaga, A. Teramoto, T. Ohmi

Electrochemical Society
12 Conference Proceedings Structure, pleiotropic actions and organotrophic roles of hepatocyte growth factor

Matsumoto, K., Nakamura, T.

Skouteris G. George
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12