Sharp Silicon Nano-Needles Based on Boron Etch-Stop in TMAH Solutions
- Author(s):
Sheping Yan Yang Xu Junyi Yang Huiquan Wang Zhonghe Jin Yuelin Wang - Publication title:
- Soft matter, biological materials and biomedical materials -- synthesis, characterization and applications : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 1301
- Pub. Year:
- 2011
- Page(from):
- 225
- Page(to):
- 228
- Pages:
- 4
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605112787 [160511278X]
- Language:
- English
- Call no.:
- M23500/1301
- Type:
- Conference Proceedings
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