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Residual Stress in Sputtered Silicon Oxycarbide Thin Films

Author(s):
Publication title:
Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1299
Pub. Year:
2011
Page(from):
185
Page(to):
190
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112763 [1605112763]
Language:
English
Call no.:
M23500/1299
Type:
Conference Proceedings

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