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Measurements of Resonance Frequency of Parylene Microspring Arrays Using Atomic Force Microscopy

Author(s):
C. Gaire
M. He
A. Zandiatashbar
P.-I. Wang
R.C. Picu
G.-C. Wang
T.-M. Lu
2 more
Publication title:
Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1299
Pub. Year:
2011
Page(from):
9
Page(to):
14
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112763 [1605112763]
Language:
English
Call no.:
M23500/1299
Type:
Conference Proceedings

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