Reliability and Stability of Thin-Film Amorphous Silicon MEMS on Glass Substrates
- Author(s):
- Publication title:
- Microelectromechanical systems--materials and devices IV : symposium held November 29-December 3, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 1299
- Pub. Year:
- 2011
- Page(from):
- 85
- Page(to):
- 90
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781605112763 [1605112763]
- Language:
- English
- Call no.:
- M23500/1299
- Type:
- Conference Proceedings
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