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Micro Probe Carrier Profiling of Ultra-Shallow Structures in Germanium

Author(s):
Trudo Clarysse
Alain Moussa
Brigitte Parmentier
Pierre Eyben
Bastien Douhard
Wilfried Vandervorst
Peter F. Nielsen
Rong Lin
Dirch H. Petersen
Fei Wang
Ole Hansen
6 more
Publication title:
Materials and devices for end-of-roadmap and beyond CMOS scaling : symposium held April 5-9, 2010, San Francisco, California
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1252
Pub. Year:
2010
Page(from):
87
Page(to):
94
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112299 [1605112291]
Language:
English
Call no.:
M23500/1252
Type:
Conference Proceedings

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