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Interfacial Properties, Surface Morphology and Thermal Stability of Epitaxial GaAs on Ge Substrates with High-k Dielectric for Advanced CMOS Applications

Author(s):
A. Kumar
G.K. Dalapati
Terence Kin Shun Wong
M.K. Kumar
C.K. Chia
H Gao
B.Z. Wang
A.S. Wong
D.Z. Chi
4 more
Publication title:
Materials and devices for end-of-roadmap and beyond CMOS scaling : symposium held April 5-9, 2010, San Francisco, California
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1252
Pub. Year:
2010
Page(from):
119
Page(to):
124
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112299 [1605112291]
Language:
English
Call no.:
M23500/1252
Type:
Conference Proceedings

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