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Rapid Thermal Annealing of Amorphous Silicon Thin Films Grown by Electron Cyclotron Resonance Chemical Vapor Deposition

Author(s):
Publication title:
Amorphous and polycrystalline thin-film silicon science and technology--2010 : symposium held April 5-9, 2010, San Francisco, California
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1245
Pub. Year:
2010
Page(from):
105
Page(to):
112
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605112220 [1605112224]
Language:
English
Call no.:
M23500/1245
Type:
Conference Proceedings

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