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ZnO Thin Film Transistors Fabricated by Atomic Layer Deposition Method

Author(s):
Publication title:
Zinc oxide and related materials--2009 : symposium held November 30-December 3, 2009, Boston, Massachusetts, USA
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1201
Pub. date:
2010
Vol.:
1201
Page(from):
265
Page(to):
270
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111742 [1605111740]
Language:
English
Call no.:
M23500/1201
Type:
Conference Proceedings

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