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HfO₂-based Thin Films Deposited by Magnetron Sputtering

Author(s):
Publication title:
Materials and physics for nonvolatile memories : symposium held April 14-17, 2009, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1160
Pub. date:
2009
Vol.:
1160
Page(from):
69
Page(to):
76
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111399 [1605111392]
Language:
English
Call no.:
M23500/1160
Type:
Conference Proceedings

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