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Growth and Layer Characterization of SrTiO₃ by Atomic Layer Deposition using Sr(tBu₃Cp)₂ and Ti(OMe)₄

Author(s):
Mihaela Popovici
Sven Van Elshocht
Nicolas Menou
Johan Swerts
Dieter Pierreux
Annelies Delabie
Karl Opsomer
Bert Brijs
Gerrit Faelens
Alexis Franquet
Thierry Conard
Jan Maes
Dirk Wouters
Jorge Kittl
9 more
Publication title:
CMOS gate-stack scaling--materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1155
Pub. date:
2009
Vol.:
1155
Page(from):
131
Page(to):
136
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111285 [1605111287]
Language:
English
Call no.:
M23500/1155
Type:
Conference Proceedings

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