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High Temperature Post-deposition Annealing Studies of Layer-by-layer (LBL) Deposited Hydrogenated Amorphous Silicon Films

Author(s):
Publication title:
Amorphous and polycrystalline thin-film silicon science and technology--2009 : symposium held April 14-17, 2009, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
1153
Pub. date:
2009
Vol.:
1153
Page(from):
57
Page(to):
62
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781605111261 [1605111260]
Language:
English
Call no.:
M23500/1153
Type:
Conference Proceedings

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