Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

Author(s):

A. Kabulski

Publication title:

Microelectromechanical systems-materials and devices II : symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

1139

Pub. Year:

2009

Page(from):

175

Page(to):

180

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781605111117 [1605111112]

Language:

English

Call no.:

M23500/1139

Type:

Conference Proceedings

Details

TDL ID:	ZA00049461
Series ID:	PA00000011
Conf. info. (Name):	MRS Fall Meeting
Conf. info. (Number):	2008
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	2008.12.01-2008.12.02

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