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Modeling and Stability Analysis of Comb-Fingers in MEMS Electrostatic Actuators

Author(s):
Publication title:
20th International Conference on Design Theory and Methodology : 2nd International Conference on Micro- and Nanosystems : presented at [the] 2008 ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, August 3-6, 2008, New York City, New York, USA
Title of ser.:
ASME Symposia Volumes
Ser. no.:
DETC 2008(4)
Pub. Year:
2008
Vol.:
4
Paper no.:
DETC2008-49731
Page(from):
641
Page(to):
646
Pages:
6
Pub. info.:
New York: American Society of Mechanical Engineers
ISBN:
9780791843284 [0791843289]
Language:
English
Call no.:
A11633/2008
Type:
Conference Proceedings

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