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Ion Flux Measurements in a Remote High Rate Depositing Plasma Using a Pulse Shape Capacitive Probe

Author(s):
  • M.C. Petcu ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • A.C. Bronneberg ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • M.A. Blauw ( Holst Centre, Eindhoven, The Netherlands )
  • M. Creatore ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
  • M.C.M. van de Sanden ( Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands )
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
593
Page(to):
597
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

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