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Comparison of Mid Frequency and Bipolar Pulsed DC Power Supplies for Dual Magnetron Sputtering

Author(s):
  • D. Ochs ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
  • P. Ozimek ( HÜTTINGER Electronic Sp. z o.o., Zielonka, Poland )
  • A. Klimczak ( HÜTTINGER Electronic Sp. z o.o., Zielonka, Poland )
  • T. Rettich ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. Year:
2008
Page(from):
366
Page(to):
369
Pages:
4
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

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