Blank Cover Image

Comparison of Mid Frequency and Bipolar Pulsed DC Power Supplies for Dual Magnetron Sputtering

Author(s):
  • D. Ochs ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
  • P. Ozimek ( HÜTTINGER Electronic Sp. z o.o., Zielonka, Poland )
  • A. Klimczak ( HÜTTINGER Electronic Sp. z o.o., Zielonka, Poland )
  • T. Rettich ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
Publication title:
51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
51
Pub. date:
2008
Vol.:
51
Page(from):
366
Page(to):
369
Pages:
4
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/51
Type:
Conference Proceedings

Similar Items:

D. Ochs, T Rettich

Society of Vacuum Coaters

D.J. Christie, W.D. Sproul, D. Carter

Society of Vacuum Coaters

J. O'Brien, P.J. Kelly, J.W. Bradley, R. Hall, R.D. Arnell

Society of Vacuum Coaters

W.D. Sproul, D.J. Christie, D.C. Carter

Society of Vacuum Coaters

D. Ochs, P. Ozimek, A. Ehiasarian, R. Spencer

Society of Vacuum Coaters

D.J. Christie, W.D. Sproul, D.C. Carter, F. Tomasel

Society of Vacuum Coaters

D.J. Christie, D. Kovalevskii, D.E. Morgan, E.A. Seymour

Society of Vacuum Coaters

G.C.B. Clarke, A. Mishra, G.T. West, P.J. Kelly, J.W. Bradley

Society of Vacuum Coaters

F. Milde, D. Schulze, G. Teschner, P. Wiedemuth, T. Rettich

Society of Vacuum Coaters

T. Rettich, P. Wiedemuth

Society of Vacuum Coaters

M. List, U. Krause, T. Wünsche

Society of Vacuum Coaters

D.J. Christie, H.V. Walde, T.J. Ash

Society of Vacuum Coaters

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12