The Historical Development of HIPIMS Power Supplies: From Laboratory to Production

The Historical Development of HIPIMS Power Supplies: From Laboratory to Production

Author(s):

D. Ochs ( Hüttinger Elektronik GmbH, Freiburg, Germany )
P. Ozimek ( Huettinger Electronic Sp. z.O.O., Zielonka, Poland )
A. Ehiasarian ( Sheffield Hallam University, Sheffield, United Kingdom )
R. Spencer ( Alacritas Consultancy Ltd., Markfield, United Kingdom )

Publication title:

51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

51

Pub. Year:

2008

Page(from):

288

Page(to):

292

Pages:

5

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/51

Type:

Conference Proceedings

Details

TDL ID:	ZA00049388
Series ID:	PA00000013
Conf. info. (Name):	Society of Vacuum Coaters. Annual technical conference
Conf. info. (Number):	2008 : 51th
Conf. info. (Venue):	Chicagom, IL, USA
Conf. info. (Date):	2008.04.19-2008.04.24

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