On Recent Progress Applying Quantum Cascade Laser-Absorption Spectroscopy for Plasma Process Monitoring

On Recent Progress Applying Quantum Cascade Laser-Absorption Spectroscopy for Plasma Process Monitoring

Author(s):

J. Roepcke ( INP-Greifswald, Greifswald, Germany )

S. Glitsch ( INP-Greifswald, Greifswald, Germany )

F. Hempel ( INP-Greifswald, Greifswald, Germany )

M. Huebner ( INP-Greifswald, Greifswald, Germany )

N. Lang ( INP-Greifswald, Greifswald, Germany )

U. Macherius ( INP-Greifswald, Greifswald, Germany )

H. Pridoehl ( INP-Greifswald, Greifswald, Germany )

S. Saβ ( INP-Greifswald, Greifswald, Germany )

G.D Stancu ( INP-Greifswald, Greifswald, Germany )

K.-D. Weltmann ( INP-Greifswald, Greifswald, Germany )

S. Welzel ( INP-Greifswald, Greifswald, Germany )

H. Zimmermann ( INP-Greifswald, Greifswald, Germany )

7 more

Publication title:

49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.

Title of ser.:

Annual Technical Conference of Society of Vacuum Coaters

Ser. no.:

49

Pub. Year:

2006

Page(from):

733

Page(to):

737

Pages:

5

Pub. info.:

Albuquerque, NM: Society of Vacuum Coaters

ISSN:

07375921

Language:

English

Call no.:

A63930/49

Type:

Conference Proceedings

Details

TDL ID:	ZA00049387
Series ID:	PA00000013
Conf. info. (Name):	Society of Vacuum Coaters. Annual technical conference
Conf. info. (Number):	2006 : 49th
Conf. info. (Venue):	Washington, D.C. USA
Conf. info. (Date):	2006.04.22-2006.04.27

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