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High Power RF and MF Systems for Flat Panel Display Applications

Author(s):
  • D. Ochs ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
  • T. Rettich ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
Publication title:
49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
49
Pub. date:
2006
Vol.:
49
Page(from):
197
Page(to):
200
Pages:
4
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/49
Type:
Conference Proceedings

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