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High Power Pulsed Magnetron Sputtered Ti Films

Author(s):
  • H.Y. Lee ( Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University, Suwon, Korea )
  • Y.M. Kim ( Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University, Suwon, Korea )
  • J.G. Han ( Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University, Suwon, Korea )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
734
Page(to):
738
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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