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Nanostructured Ti-B-C-N Thin Films Produced from Composite Targets Using Unbalanced Magnetron Sputtering

Author(s):
D. Zhong ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
I-W. Park ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
A.O. Kunrath ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
B. Mishra ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
K.H. Kim ( School of Materials Science and Engineering, Pusan National University, Busan, South Korea )
A.A. Voevodin ( Air Force Research Laboratory, MLBT, Materials Directorate, Wright Patterson Air Force Base, OH )
E.A. Levashov ( Center for SHS, Moscow State Institute for Steels and Alloys, Moscow, Russia )
J.J. Moore ( Advanced Coatings & Surface Engineering Laboratory, Colorado School of Mines, Golden, CO )
3 more
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. date:
2005
Vol.:
48
Page(from):
547
Page(to):
555
Pages:
9
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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