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Real-Time Growth Studies on the Expanding Thermal Plasma Deposited ZnO Films by Means of In Situ Spectroscopic Ellipsometry

Author(s):
  • I.Volintiru ( Eindhoven University of Technology, Department of Applied Physics, Eindhoven, The Netherlands )
  • M. Creatore ( Eindhoven University of Technology, Department of Applied Physics, Eindhoven, The Netherlands )
  • J.L. Linden ( TNO Science and Industry, Eindhoven, The Netherlands )
  • M.C.M. van de Sanden ( Eindhoven University of Technology, Department of Applied Physics, Eindhoven, The Netherlands )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
534
Page(to):
539
Pages:
6
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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