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MF and RF Systems for Large Area Glass Coating and Flat Panel Display Applications

Author(s):
  • T. Rettich ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
  • M. Blattner ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
  • P. Wiedemuth ( HÜTTINGER Elektronik GmbH + Co. KG, Freiburg, Germany )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. date:
2005
Vol.:
48
Page(from):
280
Page(to):
284
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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