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Advanced Rotatable Magnetron Module Designed for Large Area Glass Coaters

Author(s):
  • J. Brückner ( VON ARDENNE Anlagentechnik GmbH, Dresden, Germany )
  • G. Teschner ( VON ARDENNE Anlagentechnik GmbH, Dresden, Germany )
  • F. Milde ( VON ARDENNE Anlagentechnik GmbH, Dresden, Germany )
  • J. Krause ( VON ARDENNE Anlagentechnik GmbH, Dresden, Germany )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
265
Page(to):
269
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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