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Advanced CVD Silicon Carbide Barrier Technology for Protection from Detrimental Gases

Author(s):
L. Zambov ( Dow Corning Co., Midland, MI )
K. Weidner ( Dow Corning Co., Midland, MI )
V. Shamamian ( Dow Corning Co., Midland, MI )
R. Camilletti ( Dow Corning Co., Midland, MI )
U. Pernisz ( Dow Corning Co., Midland, MI )
S. Snow ( Dow Corning Co., Midland, MI )
M. Loboda ( Dow Corning Co., Midland, MI )
D. Gidley ( University of Michigan, Ann Arbor, MI )
H-G. Peng ( University of Michigan, Ann Arbor, MI )
R. Vallery ( University of Michigan, Ann Arbor, MI )
5 more
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
173
Page(to):
179
Pages:
7
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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