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Arc Handling Considerations for DC Sputtering Power Supplies

Author(s):
  • D.J. Christie ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • H.V. Walde ( Advanced Energy Industries, Inc., Fort Collins, CO )
  • T.J. Ash ( Advanced Energy Industries, Inc., Fort Collins, CO )
Publication title:
48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
48
Pub. Year:
2005
Page(from):
39
Page(to):
43
Pages:
5
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/48
Type:
Conference Proceedings

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